Rashid Rashidzadeh, Department of Electrical and Computer Engineering, University of Windsor, ON, Canada Iftekhar Ibne Basith, Department of Electrical and Computer Engineering, University of Windsor, ON, Canada
A contactless TSV probe based on the principle of resonant inductive coupling is presented in this work. The proposed scheme allows TSV data observation up to 2Gbps when the probe and TSV are 15µm apart.