MEMS, NANO, and Smart Systems, International Conference on
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Abstract

This paper focuses on microwave directional couplers fabricated using synchrotron deep X-ray lithography (DXRL), an advanced micro- and nanofabrication technology allowing the design of microwave structures with improved performance by exploring the third dimension - metal height. Demonstrated are the influence of increased metal height on the structure characteristics and performance unattainable through conventional planar fabrication techniques.
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